Kaman ParallelPro™
Wireless showerhead leveling and gapping tool for CVD process equipment
- Technologically upgraded successor to the industry-standard showerhead leveling/gapping tool for 300mm-series CVD equipment
- Measures parallelism, offset distance, and temperature via inductive (eddy current) technology
- Wireless Bluetooth Low Energy (BLE) communication to a tablet or phone app
- App-based GUI shows setup parameters and status in a chamber-representative layout; saves and analyzes calibration data
- High-capacity, field-serviceable battery pack engineered for vacuum environments
- Simplifies chamber setup, reduces operator error and technician movement
- Usable for any process control requiring precise parallelism
Specifications
| Measuring range | 0.560″ to 0.740″ |
|---|---|
| Accuracy | ±0.001″ |
| Resolution | ±0.0001″ |
| Measures | Parallelism, offset distance, and temperature |
| Communication | Bluetooth Low Energy (BLE) to an Android / iOS app |
| Power | High-capacity, field-serviceable battery pack (vacuum-rated) |
Sensors
Downloads
Certifications
Declaration of Conformity available on request.
Options
Accessories
Replacement battery packs and calibration references are available. Contact an applications engineer.
Frequently Asked Questions
What does the ParallelPro measure?
Parallelism, offset distance, and temperature — using inductive eddy current technology, with data transmitted over Bluetooth to a tablet or phone app.
Is it only for CVD equipment?
It was designed as a showerhead leveling and gapping tool for 300mm-series CVD process equipment, but it can be used for any process control that requires precise parallelism.
Why the field-serviceable battery?
The high-capacity pack is engineered for vacuum environments and is field-serviceable, providing safe extended life and reduced downtime where the tool is used many times per day.
